Laser chemical vapour deposition of Si and Si-C alloys
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Published: |
Heriot-Watt University
1989
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Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.328768 |
Main Author: | |
---|---|
Published: |
Heriot-Watt University
1989
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.328768 |