Production of polycrystalline silicon thin films on foreign substrates using electron cyclotron resonance plasma enhanced chemical vapour deposition

The wide spread adoption of solar photovoltaic cells is impeded by a number of factors, the primary one of which is the cost. The technology behind the most used cells today is based on bulk single crystalline silicon wafers. These wafers subsequently undergo numerous processesto produce a finished...

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Bibliographic Details
Main Author: Summers, Scott
Published: London South Bank University 2003
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.288177