Transmission electron microscope studies of emitters of silicon bipolar transistors
Transmission Electron Microscope (TEM) studies have been carried out of emitter regions in polysilicon contacted emitter bipolar transistors. The preparation of suitable TEM thin foils is described. In addition a technique is developed for the observation and quant jtative interpretation of the brea...
| Main Author: | |
|---|---|
| Other Authors: | |
| Published: |
University of Oxford
1989
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.253403 |