Transmission electron microscope techniques for the characterisation of III-V semiconductor heterostructures

The development of atomic layer epitaxial growth techniques for semiconductors has allowed structures to be fabricated in which layers of different composition (and therefore different bandgap) are successively deposited. Layer thicknesses are typically a few tens of nanometres and may even be of un...

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Bibliographic Details
Main Author: Britton, E. G.
Published: University of Cambridge 1987
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.233706