Exploration of the Cold-Wall CVD Synthesis of Monolayer MoS2 and WS2
abstract: A highly uniform and repeatable method for synthesizing the single-layer transition metal dichalcogenides (TMDs) molybdenum disulfide, MoS2, and tungsten disulfide, WS2, was developed. This method employed chemical vapor deposition (CVD) of precursors in a custom built cold-wall reaction c...
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Format: | Doctoral Thesis |
Language: | English |
Published: |
2019
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Online Access: | http://hdl.handle.net/2286/R.I.54827 |