Mathematical-based Approaches for the Semiconductor Capital Equipment Installation and Qualification Scheduling Problem

abstract: Ramping up a semiconductor wafer fabrication facility is a challenging endeavor. One of the key components of this process is to schedule a large number of activities in installing and qualifying (Install/Qual) the capital intensive and sophisticated manufacturing equipment. Activities in...

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Bibliographic Details
Other Authors: Cheng, Junzilan (Author)
Format: Doctoral Thesis
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/2286/R.I.29822