Novel Electrical Measurement Techniques for Silicon Devices

Novel Electrical Measurement Techniques for Silicon Devices

abstract: Semiconductor manufacturing economics necessitate the development of innovative device measurement techniques for quick assessment of products. Several novel electrical measurement techniques will be proposed for screening silicon device parameters. The studied parameters range from oxide...

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Bibliographic Details
Other Authors: Elhami Khorasani, Arash (Author)
Format: Doctoral Thesis
Language:English
Published: 2015
Subjects:
Materials Science
Electrical engineering
Device Physics
Semiconductor Characterization
Semiconductor Device
Online Access:http://hdl.handle.net/2286/R.I.27571

Internet

http://hdl.handle.net/2286/R.I.27571

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