Interface Electronic State Characterization of Plasma Enhanced Atomic Layer Deposited Dielectrics on GaN
abstract: In this dissertation, the interface chemistry and electronic structure of plasma-enhanced atomic layer deposited (PEALD) dielectrics on GaN are investigated with x-ray and ultraviolet photoemission spectroscopy (XPS and UPS). Three interrelated issues are discussed in this study: (1) PEALD...
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| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
2014
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| Online Access: | http://hdl.handle.net/2286/R.I.24827 |