Novel Low Temperature Processing for Enhanced Properties of Ion Implanted Thin Films and Amorphous Mixed Oxide Thin Film Transistors
abstract: This research emphasizes the use of low energy and low temperature post processing to improve the performance and lifetime of thin films and thin film transistors, by applying the fundamentals of interaction of materials with conductive heating and electromagnetic radiation. Single frequen...
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| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
2013
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| Online Access: | http://hdl.handle.net/2286/R.I.17989 |