Fringe-print-through error analysis and correction in snapshot phase-shifting interference microscope
To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the s...
| Main Authors: | , , |
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| Other Authors: | |
| Language: | en |
| Published: |
OPTICAL SOC AMER
2017
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| Online Access: | http://hdl.handle.net/10150/626052 http://arizona.openrepository.com/arizona/handle/10150/626052 |