High Precision Optical Surface Metrology using Deflectometry
Software Configurable Optical Test System (SCOTS) developed at University of Arizona is a highly efficient optical metrology technique based on the principle of deflectometry, which can achieve comparable accuracy with interferometry but with low-cost hardware. In a SCOTS test, an LCD display is use...
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| Language: | en_US |
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The University of Arizona.
2015
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| Online Access: | http://hdl.handle.net/10150/581252 |