Characterization and Control of Molecular Contaminants on Oxide Nanoparticles and in Ultra High Purity Gas Delivery Systems for Semiconductor Manufacturing
Molecular contaminants on the surface of nanoparticles (NPs) are critical in determining the environmental safety and health (ESH) impacts of NPs. In order to characterize the surface properties that relate to adsorption and desorption interactions, a method has been developed for studying the dynam...
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| Language: | en |
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The University of Arizona.
2013
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| Online Access: | http://hdl.handle.net/10150/293417 |