A scanning grating technique for measurement of submicron focused spots

A scanning grating technique for measurement of submicron focused spots

Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scann...

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Bibliographic Details
Main Author: Mortimer, Beth Ann, 1965-
Other Authors: Kostuk, Raymond K.
Language:en_US
Published: The University of Arizona. 1988
Subjects:
Optical storage devices > Equipment and supplies.
Diffraction gratings.
Scanning systems.
Online Access:http://hdl.handle.net/10150/291569
id ndltd-arizona.edu-oai-arizona.openrepository.com-10150-291569
record_format oai_dc
spelling ndltd-arizona.edu-oai-arizona.openrepository.com-10150-2915692015-10-23T05:15:34Z A scanning grating technique for measurement of submicron focused spots Mortimer, Beth Ann, 1965- Kostuk, Raymond K. Optical storage devices -- Equipment and supplies. Diffraction gratings. Scanning systems. Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scanning grating technique. However, many characteristics of this measurement technique have not been fully examined. In this paper, the sensitivity of this measurement technique to the scanning mechanism, beam characteristics, and grating tilt is evaluated. 1988 text Thesis-Reproduction (electronic) http://hdl.handle.net/10150/291569 22271741 1335432 .b17390540 en_US Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. The University of Arizona.
collection NDLTD
language en_US
sources NDLTD
topic Optical storage devices -- Equipment and supplies.
Diffraction gratings.
Scanning systems.
spellingShingle Optical storage devices -- Equipment and supplies.
Diffraction gratings.
Scanning systems.
Mortimer, Beth Ann, 1965-
A scanning grating technique for measurement of submicron focused spots
description Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scanning grating technique. However, many characteristics of this measurement technique have not been fully examined. In this paper, the sensitivity of this measurement technique to the scanning mechanism, beam characteristics, and grating tilt is evaluated.
author2 Kostuk, Raymond K.
author_facet Kostuk, Raymond K.
Mortimer, Beth Ann, 1965-
author Mortimer, Beth Ann, 1965-
author_sort Mortimer, Beth Ann, 1965-
title A scanning grating technique for measurement of submicron focused spots
title_short A scanning grating technique for measurement of submicron focused spots
title_full A scanning grating technique for measurement of submicron focused spots
title_fullStr A scanning grating technique for measurement of submicron focused spots
title_full_unstemmed A scanning grating technique for measurement of submicron focused spots
title_sort scanning grating technique for measurement of submicron focused spots
publisher The University of Arizona.
publishDate 1988
url http://hdl.handle.net/10150/291569
work_keys_str_mv AT mortimerbethann1965 ascanninggratingtechniqueformeasurementofsubmicronfocusedspots
AT mortimerbethann1965 scanninggratingtechniqueformeasurementofsubmicronfocusedspots
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