A scanning grating technique for measurement of submicron focused spots

Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scann...

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Bibliographic Details
Main Author: Mortimer, Beth Ann, 1965-
Other Authors: Kostuk, Raymond K.
Language:en_US
Published: The University of Arizona. 1988
Subjects:
Online Access:http://hdl.handle.net/10150/291569