Impedance determination of a RF plasma discharge by external measurements
The equivalent impedance of a RF plasma was experimentally determined by monitoring the voltage and current waveform for different input powers in real time. Average ion energies and fluxes were determined by a computer model which takes ion collisions in the sheath regions into account. In addition...
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| Language: | en_US |
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The University of Arizona.
1989
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| Online Access: | http://hdl.handle.net/10150/277141 |