IC defect detection using color information and image processing

Most current commercial automated IC inspection systems use gray-level or binary images for IC defect detection in spite of the fact that color permits defect detection where gray-level information is insufficient. Three color image processing techniques including the spectral-spatial clustering, pr...

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Bibliographic Details
Main Author: Yang, Hsien-Min, 1957-
Other Authors: Schowengerdt, Robert
Language:en_US
Published: The University of Arizona. 1988
Subjects:
Online Access:http://hdl.handle.net/10150/276831
http://arizona.openrepository.com/arizona/handle/10150/276831