BIOLOGICAL AND PHYSICAL-CHEMICAL METHODS FOR TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENTS
Semiconductor manufacturing is one of the most advancing, growing and evolving industries. The production of semiconductors presents several challenges, both technologically and environmentally. The amount and complexity of the chemical substances utilized in the manufacturing process has been growi...
| Main Author: | |
|---|---|
| Other Authors: | |
| Language: | EN |
| Published: |
The University of Arizona.
2009
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10150/195838 |