FUNDAMENTAL CHARACTERIZATION OF TRIBOLOGICAL, THERMAL, FLUID DYNAMIC AND WEAR ATTRIBUTES OF CONSUMABLES IN CHEMICAL MECHANICAL PLANARIZATION
This dissertation presents several studies relating to fundamental characterization of CMP consumables in planarization processes. These are also evaluated with the purposes of minimizing environmental impact and reducing cost of ownership (COO).The first study is conducted to obtain the retaining r...
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| Language: | en |
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The University of Arizona.
2010
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| Online Access: | http://hdl.handle.net/10150/195125 |