Fundamental Consumables Characterization of Advanced Dielectric and Metal Chemical Mechanical Planarization Processes
This dissertation presents a series of studies relating to kinetics and kinematics of inter-layer dielectric and metal chemical mechanical planarization processes. These are also evaluated with the purposes of minimizing environmental and cost of ownership impact.The first study is performed to obta...
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| Language: | EN |
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The University of Arizona.
2008
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| Online Access: | http://hdl.handle.net/10150/194544 |