Sub-micron Patterning of ZnO-PMMA Hybrid Films

Sub-micron patterning is fundamental to the fabrication of numerous devices Traditional commercial manufacturing methods either lack the resolution needed to attain the appropriate size or are prohibitively expensive due to low throughput or the necessity of expensive equipment. Imprint lithography...

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Bibliographic Details
Main Author: Gervasio, Michelle Rose
Other Authors: Materials Science and Engineering
Format: Others
Published: Virginia Tech 2019
Subjects:
Online Access:http://hdl.handle.net/10919/86887