Synthesis and characterization of (β-diketonate) zirconium alkoxides for low temperature chemical vapor deposition of lead zirconium titanium thin films
Metal alkoxides have been known for many years. Recently, a renewed interest in these compounds has arisen as they have been found to be viable precursors for metal oxide film synthesis. Lead zirconium titanate(PZT) films have shown promise for many applications in the electronics industry. Chemical...
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| Format: | Others |
| Language: | en |
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/44952 http://scholar.lib.vt.edu/theses/available/etd-10012008-063017/ |