Photonic studies of defects and amorphization in ion beam damaged GaAs surfaces
In the present investigation, a comprehensive photonic characterization and analysis of low energy Ar⁺ ion beam processed GaAs surfaces is presented. The purpose of this investigation was to evaluate the damage and amorphization introduced at the surface and sub-surface regions by ion bombardment. A...
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| Format: | Others |
| Language: | en |
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/39121 http://scholar.lib.vt.edu/theses/available/etd-08082007-170507/ |