Optimal and Approximate Algorithms for the Multiple-Lots-per-Carrier Scheduling and Integrated Automated Material Handling and Lot Scheduling Problems in 300mm Wafer Fabs
The latest generation of semiconductor wafer fabs produce Integrated Circuits (ICs) on silicon wafers of 300mm diameter. In this dissertation, we address the following two types of (new) scheduling problems that are encountered in this generation of wafer fabs: multiple-lots-per-carrier scheduling p...
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Virginia Tech
2014
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| Online Access: | http://hdl.handle.net/10919/28890 http://scholar.lib.vt.edu/theses/available/etd-09072008-205305/ |