Enhanced defect generation in gate oxides of P-channel MOS transistors in the presence of water

Hydrogenous species play a key role in radiation induced charge buildup in metal oxide semiconductor field effect transistors (MOSFETs). The effects of water on defect formation in MOSFETs before and after radiation exposure have been studied. Transistors built in Sandia National Laboratories'...

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Bibliographic Details
Main Author: DASGUPTA, ARITRA
Other Authors: Daniel M. Fleetwood
Format: Others
Language:en
Published: VANDERBILT 2009
Subjects:
Online Access:http://etd.library.vanderbilt.edu/available/etd-02062009-162823/