Compensation-oriented quality control in multistage manufacturing processes

Compensation-oriented quality control in multistage manufacturing processes

Significant research has been initiated recently to devise control strategies that could predict and compensate manufacturing errors using so called explicit Stream-of-Variation(SoV) models that relate process parameters in a Multistage Manufacturing Process (MMP) with product quality. This doctoral...

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Bibliographic Details
Main Author: Jiao, Yibo
Format: Others
Language:English
Published: 2012
Subjects:
Stream of variation
Multistage manufacturing process
Compensability and diagnosability
Multi-layer overlay errors
Linear fractional transformation
Robust control
Online Access:http://hdl.handle.net/2152/ETD-UT-2012-08-5961

Internet

http://hdl.handle.net/2152/ETD-UT-2012-08-5961

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