Improvement of belt tension monitoring in a belt-driven automated material handling system
The goal of the study presented in this thesis was the improvement of estimation and monitoring procedures for condition monitoring of belt tension and misalignment in belt-driven automated material handling systems widely used in modern semiconductor manufacturing systems. In pursuit of this goal,...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | English |
| Published: |
2010
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/2152/ETD-UT-2010-08-1712 |