Advanced organic materials for lithographic applications
The microelectronics industry is driven by the need to produce smaller transistors at lower costs, and this requires an ever-changing approach to the chemistry involved in their fabrication. While photolithography has been able to keep pace with Moore’s law over the past four decades, alternative pa...
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| Format: | Others |
| Language: | English |
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2011
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| Online Access: | http://hdl.handle.net/2152/ETD-UT-2010-08-1532 |