The refractive index and absorbance of aqueous and organic fluids for immersion lithography
The semiconductor industry is continually challenged to maintain the trend identified in 1965 by Gordon Moore of increasing the density of transistors on an integrated circuit. These advances have been achieved by increasing the resolution that can be printed with photolithography, traditionally by...
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| Format: | Others |
| Language: | English |
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2010
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| Online Access: | http://hdl.handle.net/2152/7578 |