Interface study for template release in step and flash imprint lithography

Interface study for template release in step and flash imprint lithography

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Bibliographic Details
Main Author:	Wu, Kai
Format:	Others
Language:	English
Published:	2008
Subjects:	Microlithography
Online Access:	http://hdl.handle.net/2152/3002

Internet

http://hdl.handle.net/2152/3002