Semiconductor manufacturing inspired integrated scheduling problems : production planning, advanced process control, and predictive maintenance
This dissertation is composed of three major parts, each studying a problem related to semiconductor manufacturing. The first part of the dissertation proposes a high-level scheduling model that serves as an intermediate stage between planning and detailed scheduling in the usual planning hierarchy....
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| Format: | Others |
| Language: | English |
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2012
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| Online Access: | http://hdl.handle.net/2152/17950 |