Studies of nontraditional high resolution thin film patterning techniques

Studies of nontraditional high resolution thin film patterning techniques

This thesis discusses two patterning techniques: Step and Flash Imprint Lithography, a nanoimprint technique, and patterning thin films utilizing electrohydrodynamic instabilities. Step and Flash Imprint Lithography, SFIL, is promising alternative approach to photolithography. SFIL replicates the re...

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Bibliographic Details
Main Author: Collister, Elizabeth Ann
Format: Others
Language:English
Published: 2012
Subjects:
Step and Flash Imprint Lithography
Patterning thin films
Electrohydrodynamic instabilities
Photocurable liquid
Online Access:http://hdl.handle.net/2152/17295

Internet

http://hdl.handle.net/2152/17295

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