Theoretical studies of radio-frequency sheath

Theoretical studies of radio-frequency sheath

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Bibliographic Details
Main Author: Xiang, Nong, 1964-
Format: Others
Language:English
Published: 2011
Subjects:
Plasma sheaths
Radio frequency
Online Access:http://hdl.handle.net/2152/12820

Internet

http://hdl.handle.net/2152/12820

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