Evanescent Wave Coupling Using Different Subwavelength Gratings for a MEMS Accelerometer
A novel technique of coupling near-field evanescent waves by means of variable period subwavelength gratings (1.2 ìm and 1.0 ìm), using a 1.55 ìm infrared semiconductor laser is presented for the use of an optical MEMS accelerometer. The subwavelength gratings were fabricated on both glass and silic...
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| Format: | Others |
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Scholar Commons
2011
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| Online Access: | http://scholarcommons.usf.edu/etd/3319 http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=4514&context=etd |