Hollow-electrode pulsed plasma deposition of titanium and carbon thin films
This thesis presents a study of a pulsed distributed arc plasma deposition method that has been developed to produce highly ionized pulsed plasma plumes of metallic species in the presence of a low-pressure inert or reactive gas glow discharge. A pulse-forming network (PFN) is used to form a transie...
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| Format: | Others |
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Scholar Commons
2006
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| Online Access: | http://scholarcommons.usf.edu/etd/2569 http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=3568&context=etd |