Processing And Characterization Of Zinc Oxide Thin Films
Zinc oxide is a very versatile material that can be used in many microsystems and MEMS applications. ZnO thin film has been utilized in a wide variety of MEMS devices because of its unique piezoelectric, optical, and electrical properties. In particular, piezoelectric property of ZnO can be used in...
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| Format: | Others |
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Scholar Commons
2007
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| Online Access: | https://scholarcommons.usf.edu/etd/694 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1693&context=etd |