Novel Nanoindentation-Based Techniques for MEMS and Microfluidics Applications
In this thesis, the mechanical characterization of thin films, bulk materials, compliant MEMS and Microfluidics has been discussed. In chapter1 and chapter 2, the Indentation Size Effect (ISE) has been studied for single crystal aluminum and the substrate effect has also been studied for 200 nm gold...
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| Format: | Others |
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Scholar Commons
2008
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| Online Access: | https://scholarcommons.usf.edu/etd/220 https://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=1219&context=etd |