Modeling and analysis of thick suspended deep x-ray liga inductors on CMOS/BiCMOS substrate
Modeling and simulation results for two types of 150 μm height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 μm CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compa...
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| Format: | Others |
| Language: | en |
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University of Saskatchewan
2006
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| Online Access: | http://library.usask.ca/theses/available/etd-07312006-101710/ |