Investigation on LIGA-MEMS and on-chip CMOS capacitors for a VCO application

Modern communication systems require high performance radio frequency (RF) and microwave circuits and devices. This is becoming increasingly challenging to realize in the content of cost/size constraints. Integrated circuits (ICs) satisfy the cost/size requirement, but performance is often sacri¯ced...

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Bibliographic Details
Main Author: Fang, Linuo
Other Authors: Klymyshyn, David M.
Format: Others
Language:en
Published: University of Saskatchewan 2007
Subjects:
Online Access:http://library.usask.ca/theses/available/etd-07032007-153258/