Advanced TCAD Simulations and Characterization of Semiconductor Devices
Today, micro- and nano-electronic devices are becoming more complex and advanced as the dimensions are shrinking. It is therefore a very challenging task to develop new device technologies with performance that can be predicted. This thesis focuses on advanced measurement techniques and TCAD simulat...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Fasta tillståndets elektronik
2006
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6883 http://nbn-resolving.de/urn:isbn:91-554-6567-6 |