Design and fabrication of Si diaphragms for capacitive pressure sensors in high-pressure microfluidics
The pressure has a major impact when it comes to control of chemical processes. A method for integrating electrical pressure sensors in high-pressure microfluidic chips has, however, so far not been developed and the aim of this project was therefore to study how capacitive pressure sensors could be...
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| Format: | Others |
| Language: | English |
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Uppsala universitet, Mikrosystemteknik
2021
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-457019 |