Sputtering of High Quality Layered MoS2 films

Sputtering of High Quality Layered MoS2 films

We have deposited bulk, monolayer and few-layers as well as large-scale 2D layered MoS2 thin films by pulsed DC magnetron sputtering from an MoS2 target. MoS2 has gained great attention lately, together with other layered Transition Metal Dichalcogenides (TMDCs), for its unique optical and electrica...

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Bibliographic Details
Main Author: Abid Al Shaybany, Sari
Format: Others
Language:English
Published: Uppsala universitet, Fasta tillståndets elektronik 2020
Subjects:
MoS2
molybdenum
molybdenum disulfide
sputtering
magnetron sputtering
high quality
sulfur
H2S
argon
pressure
temperature
high temperature
monolayer
few layers
large scale
Engineering and Technology
Teknik och teknologier
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-427144

Internet

http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-427144

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