Fabrication and Characterization of Si-on-SiC Hybrid Substrates
In this thesis, we are making a new approach to fabricate silicon on insulator (SOI). By replacing the buried silicon dioxide and the silicon handling wafer with silicon carbide through hydrophilic wafer bonding, we have achieved silicon on crystalline silicon carbide for the first time and silicon...
| Main Author: | |
|---|---|
| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
Uppsala universitet, Fasta tillståndets elektronik
2013
|
| Subjects: | |
| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-221664 http://nbn-resolving.de/urn:isbn:978-91-554-8794-2 |