Miniature Phase-Transistion Actuators
Clearly, there is a need for simple, strong actuators capable of large strokes in miniaturized systems such as valves and optical shutters. The basis for this work is the microstructure technology with processing techniques adopted from the integrated circuit industry. In many cases alternative tech...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Institutionen för materialvetenskap
2002
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-2138 http://nbn-resolving.de/urn:isbn:91-554-5345-7 |