Thin Films and Deposition Processes Studied by Soft X-Ray Spectroscopy
This thesis deals with studies of thin films using soft x-ray emission spectroscopy. Thin films are frequently used in optical, semiconductor and magnetic applications, and along with the development of thin film deposition techniques, there is a growing need for thin film characterisation and produ...
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| Format: | Doctoral Thesis |
| Language: | English |
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Uppsala universitet, Institutionen för materialvetenskap
2001
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-1095 http://nbn-resolving.de/urn:isbn:91-554-5006-7 |