Quantum chemical studies of the chloride-based CVD process for Silicon Carbide
In this report the interaction between SiH2 molecules and a SiC-4H (0001) surface and SiCl2 molecules and a SiC-4H (0001) surface is investigated. This is done using a cluster model to represent the surface. First the clusters are investigated by calculating some properties to compare with experimen...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Institutionen för fysik, kemi och biologi
2012
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-85548 |