Combinatorial T hin F ilm Synthe sis of Cr2AlC; aComparison of Two Sputte ring M e tho ds
MAX phase materials have unique properties that combine metals and ceramics.These properties stems from the complex structure with extremely strong M-Xbonds and weaker M-A bonds. Physical vapor deposition in form of magnetronsputtering is widely used for thin film syntheses. High Power Impulse Magne...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2012
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-77187 |