Synthesis and Characterisation of Magnetron Sputtered Alumina-Zirconia Thin Films
Alumina-Zirconia thin films were grown on a range of substrates using dual magnetron sputtering. Film growth was achieved at a relatively low temperature of 450 °C and at higher temperatures up to 810 °C. The films were grown on well-defined surfaces such as silicon (100) but also on industrially re...
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| Format: | Others |
| Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2006
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-7513 http://nbn-resolving.de/urn:isbn:91-85523-40-2 |