The HiPIMS Process
The work presented in this thesis involves experimental and theoretical studies related to a thin film deposition technique called high power impulse magnetron sputtering (HiPIMS), and more specifically the plasma properties and how they influence the coating. HiPIMS is an ionized physical vapor dep...
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| Format: | Doctoral Thesis |
| Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2010
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| Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-56748 http://nbn-resolving.de/urn:isbn:978-91-7393-419-0 |