Stress-free titanium-based thin films for inner ear microphones : The last missing part of a technology for totally implantable hearing aid implants

An implantable hearing aid device is being developed by a project group which is part of an EU initiative. This device contains a diaphragm consisting of a submicron thick freestanding titanium film, which should be free of internal stresses. Stress is the force exerted per unit cross-sectional area...

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Bibliographic Details
Main Author: Ehsan, Dina
Format: Others
Language:English
Published: Linköpings universitet, Tunnfilmsfysik 2020
Subjects:
Online Access:http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-169705