Stress-free titanium-based thin films for inner ear microphones : The last missing part of a technology for totally implantable hearing aid implants
An implantable hearing aid device is being developed by a project group which is part of an EU initiative. This device contains a diaphragm consisting of a submicron thick freestanding titanium film, which should be free of internal stresses. Stress is the force exerted per unit cross-sectional area...
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Format: | Others |
Language: | English |
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Linköpings universitet, Tunnfilmsfysik
2020
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Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-169705 |