Alumina Thin Films : From Computer Calculations to Cutting Tools
The work presented in this thesis deals with experimental and theoretical studies related to alumina thin films. Alumina, Al2O3, is a polymorphic material utilized in a variety of applications, e.g., in the form of thin films. However, controlling thin film growth of this material, in particular at...
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Format: | Doctoral Thesis |
Language: | English |
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Linköpings universitet, Plasma och beläggningsfysik
2008
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Online Access: | http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-15360 http://nbn-resolving.de/urn:isbn:978-91-7393-769-6 |